Mid-Freq RF – Zerif Technologies Ltd.

EHT Semi Mid-Frequency RF™ | Wafer Bias | 25 kV, 100 kW, 3 kA, 1 MHz

Bipolar | Tightly Controlled Wafer Voltages | Narrow Ion Energy Distributions (IED) | Small Critical Dimensions

EHT Semi “Mid-Frequency RF™” Matchless RF Generator

Application

Benefits

Electrical spec

Mid-Frequency Matchless RF 100 kW, 100 kHz - 1 MHz, 3 kA, and 25 kV Generator with very low impedance drive direct couples to plasma.
Mid-Frequency Matchless RF 100 kW, 100 kHz - 1 MHz, 3 kA, and 25 kV Generator.
Mid-Frequency Matchless RF Generator Waveform with 200 µs pulses of 400 kHz RF burst mode and more than 25 kV output voltage.
Mid-Frequency Matchless RF Generator Waveform with 200 µs pulses of 400 kHz RF burst mode.